By minimizing the size of high-cleanliness spaces, we reduce both the initial cost and running costs of equipment. This also contributes to improving product quality and yield.

For manufacturing equipment requiring high-performance alignment (semiconductor and LCD exposure systems) and precision measurement devices (electronic balances), we achieve energy savings, low cost, and high accuracy through direct expansion coils combined with hot gas reheating.

• Installation Example of Direct Expansion Space Fine Unit
  • As precision temperature-controlled chambers installed within semiconductor and LCD factories
• High-precision multi-loop controller adopted
  • Cascade control of discharge air using a two-point sensor
  • Appropriately adjust disturbance correction control according to the installation environment
• Cleanliness 0.1μm, Class 1
• Low outgassing materials reduce chemical concentrations within the chamber (ITRS compliant)
• Features special insulated panels